3.Where do all these tiny particles come from?
5.How to classified cleanroom?
Cleanroom can be classified according to the level of cleanliness. We usually use U.S Federal Standard, which We messured the class of Cleanroom by the numbers of particle larger than 0.5 micron in diameter contained in one cubic foot of air. For example. Class 100 cleanroom contains fewer than 100 of such particle in one cubic foot. Beside US Federal standard, ISO 14644 also another type of classification. Tables below show the two standard.
Table 1: Airborne Particle Requirements for ISO 14644 and Federal Standard 209 |
|||||||
ISO 14644-1 |
Obsolete Federal Standard 209 |
Number of particles per m 3 by micrometer size |
|||||
0.1μm |
0.2μm |
0.3μm |
0.5μm |
1μm |
5μm |
||
1 |
- |
10 |
2 |
- |
- |
- |
- |
2 |
- |
100 |
24 |
10 |
4 |
- |
- |
3 |
1 |
1,000 |
237 |
102 |
35 |
8 |
- |
4 |
10 |
10,000 |
2,370 |
1,020 |
352 |
83 |
- |
5 |
100 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
6 |
1,000 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
7 |
10,000 |
- |
- |
- |
352,000 |
83,200 |
2,930 |
8 |
100,000 |
- |
- |
- |
3,520,000 |
832,000 |
29,300 |
9 |
- |
- |
- |
- |
35,200,000 |
8,320,000 |
293,000 |
Table 4: Comparison of FDA, NASA, EU-GMP Standards |
||||||||
Cleanliness Class |
FDA |
NASA |
EU-GMP |
|||||
CFU/m 3 (CFU/ft 3) |
CFU/m 3 (CFU/ft 3) |
CFU/ m 3 |
At Rest |
In Operation |
||||
0.5 μm/ m 3 |
5 μm/ m 3 |
0.5 μm/ m 3 |
5μm/ m 3 |
|||||
A |
100 |
- |
- |
<1 |
3,500 |
- |
3,500 |
- |
B |
100 |
3.5 (0.1) |
3.5 (0.1) |
10 |
3,500 |
- |
350,000 |
2,000 |
C |
10,000 |
- |
18 (0.5) |
100 |
350,000 |
2,000 |
3,500,000 |
20,000 |
D |
100,000 |
88 (2.5) |
88 (2.5) |
200 |
3,500,000 |
20,000 |
- |
- |
Note: The above information is for reference only. Please refer to the respective Standards for exact details.
6.How about our surrounding environment?
7.How do cleanrooms stay clean?
9.What does HEPA filter stand for?
10.What does ULPA filter stand for?
11.What exactly is an airshower?
